Project Details
Description
The scope of this work is to develop comprehensive and methodical approach to reduce the losses in Silicon Nitride (SiN) in order to achieve an ultra-high quality (Q) factor (e.g. 100 million) of on-chip resonators.
| Status | Finished |
|---|---|
| Effective start/end date | 8/18/15 → 5/18/16 |
Funding
- Defense Advanced Research Projects Agency: US$300,000.00
ASJC Scopus Subject Areas
- Social Sciences(all)
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